The Korean Journal of Ceramics

The Korean Ceramic Society (한국세라믹학회)
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Effect of Seeding Layers on Preparation of PLZT Thin Films by Sol-Gel Method

  • Hirano, Tomio (Department of Materials Science, Shizuoka University) ;
  • Kawai, Hiroki (Department of Materials Science, Shizuoka University) ;
  • Suzuki, Hisao (Department of Materials Science, Shizuoka University) ;
  • Kaneko, Shoji (Department of Materials Science, Shizuoka University) ;
  • Wada, Tatsuya (1st Automotive Instruments R&D Division of Yazaki Meter Co., Ltd)
  • Published : 1999.03.01
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Abstract

$(Pb_xLa_{1-x}) (Zr_yTi_{1-y})O_3$ (PLZT) thin films with electrooptic effect are promising for the optical application such as display or light shutter. However, it is difficult to use inexpensive and transparent glass substrates because the conventional process for preparation of PLZT requires temperatures above $600^{\circ}C$. In order to deposit a perovskite PLZT thin films at low processing temperatures through alkoxide route, we have offered several seeding processes which reduce the activation energy for crystallization. In this study, we optimized the stacking structure of multilayered PLZT for obtaining single phase perovskite at lower temperatures. As a result, ferroelectric PLZT thin films with different compositions were successfully prepared at a temperature as low at $500^{\circ}C$.

Keywords

References

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