The Transactions of the Korean Institute of Electrical Engineers B (대한전기학회논문지:전기기기및에너지변환시스템부문B)

The Korean Institute of Electrical Engineers (대한전기학회)
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Characteristic Analysis of Spiral Type Thin-Film Inductor Using Finite Element Method

유한요소법을 이용한 스파이럴 박막인덕터의 특성해석

  • 하경호 (창원대 전기공학과) ;
  • 홍정표 (창원대 전기공학과) ;
  • 송재성 (한국전기연구소 신소재응용연구구룹) ;
  • 민복기 (한국전기연구소 신소재응용연구구룹) ;
  • 김현식 (한국전기연구소 신소재응용연구구룹)
  • Published : 1999.11.01
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Abstract

The spiral type thin-film inductor performed in high frequency at 2-5[MHz] range is analyzed by 2-dimensional Finite Element Method(2D FEM). The features of micro thin-film inductor have complicated electromagnetic phenomenon such as skin effect, proximity effect and magnetic saturation. To develope miniatured magnetic device considering these features, it is important to predict the property of the thin film inductor according to design parameter. In this paper, we present the 2D FEM analysis for the spiral type thin film inductor. The characteristics of inductor from point of view of inductance, resistance and quality factor are studied according to design parameter and various pattern construction.

Keywords

References

  1. 고주파 박형 자기소자 개발에 관한 1~3차 보고서 한국 전기연구소
  2. HDD용 thin film head의 특성과 제조공정 v.3 우창화
  3. IEEE Trans. on Magn. v.31 Development of thin film head ofr VCR H. Ogawa(et al.)
  4. 대한전자공학회 추계학술대회 논문집 초소형 전원용 자기박막 인덕터의 해석 및 제조 김지원;조순철
  5. IEEE Trans. on Magn. v.28 Characteristics analysis of a thin film inductor with closed magnetic circuit structure M. Yamaguch(et al.)
  6. Applied Physics v.85 Fabrication of thin film inductors using FeTaN soft magnetic films C. H. Lee(et al.)
  7. マイクロ磁氣デバイスのすべて 白江 公輔(外2人)
  8. IEEE Trans. on Magn. v.27 Analysis of the inductance and stray capacitance of the dry-etched micro inductors M. Yamaguch(et al.)
  9. IEEE Tran. on Magn. v.31 Characteristic of magnetic thin film inductors at large magnetic field M. Yamaguchi;H. Okumaguchi;K. I. Arai
  10. IEEE Tran. on Magn. v.34 2D ad 3D simulation of toroidal type thin film inductors H. J. Ryu(et al.)
  11. 전기계의 유한요소법 임달호
  12. 電磁氣學現象理論 竹山設三