Design of the Detection Circuitry for the Characteristics of Micromachined Vibrating Gyroscope

미세가공 진동형 자이로스코프의 특성 감지 회로의 설계에 관한 연구

  • Published : 1999.10.01

Abstract

A new technique to measure low level capacitance variations of the gyroscope is proposed and verified by computer simulation. It is based on the new CV(capacitance-voltage) converter circuit biased by dc current source and the peak detector without low pass filter. The CV converter biased by dc current source provides good signal-to-noise ratio and this setup of the detection circuitry without low pass filter makes it possible to provide short settling time, that is, higher speed of measurement and wide operation range if only a few parameters are adjusted. The key parameters that affect the performance of the detection circuitry are illustrated and computer simulation results are presented. The demonstrated detection circuitry shows linear response from 10 fF to 130 fF at 10 kHz and shows good linearity.

Keywords

References

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