대한전기학회논문지:전기물성ㆍ응용부문C (The Transactions of the Korean Institute of Electrical Engineers C)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

미세가공 진동형 자이로스코프의 특성 감지 회로의 설계에 관한 연구

Design of the Detection Circuitry for the Characteristics of Micromachined Vibrating Gyroscope

  • 발행 : 1999.10.01
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

A new technique to measure low level capacitance variations of the gyroscope is proposed and verified by computer simulation. It is based on the new CV(capacitance-voltage) converter circuit biased by dc current source and the peak detector without low pass filter. The CV converter biased by dc current source provides good signal-to-noise ratio and this setup of the detection circuitry without low pass filter makes it possible to provide short settling time, that is, higher speed of measurement and wide operation range if only a few parameters are adjusted. The key parameters that affect the performance of the detection circuitry are illustrated and computer simulation results are presented. The demonstrated detection circuitry shows linear response from 10 fF to 130 fF at 10 kHz and shows good linearity.

키워드

참고문헌

  1. Sensors and Actuators v.A 50 A micromachined vibrating gyroscope K. Tanaka;Y. Mochida;M. Sugimoto;K. Moriya;T. Hasegawa;K. Atsuchi;K. Ohwada
  2. Sensors and Actuators v.A 43 Micromachined gyroscope Jan Soderkvist
  3. Sensors and Actuators v.A 43 A study of silicon angular rate sensors using anisotropic etching technology K. Maenaka;T. Shiozawa
  4. IEEE Transactions on Instrumentation and Measurement v.42 no.5 Differential synchronous demodulation for small signal amplitude estimation Christos S. Koukourlis;Vassilios K. Trigonidis;John N. Sahalos
  5. Sensors and Actuators v.A 61 Design, realization and characterization of a symmetrical triaxial capacitive accelerometer for medical applications J.C. Lotters;W. Olthuis;P.H. Veltink;P. Bergveld
  6. Sensors and Actuators v.A 45 A surface micromachined silicon accelerometer with on-chip detection circuitry Wolfgang Kuehnel;Steven Sherman
  7. IEEE Transactions on Electron Devices v.Ed-29 no.1 Micromechanical accelerometer integrated with MOS detection circuitry Kurt E. Petersen;Anne Shartel;Norman F. Raley