The Transactions of the Korean Institute of Electrical Engineers C (대한전기학회논문지:전기물성ㆍ응용부문C)

The Korean Institute of Electrical Engineers (대한전기학회)
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Application of Low-hydrogenated Diamond-like Carbon Film to Mo-tip Field Emitter Array

낮은 수소 함유량을 갖는 유사 다이아몬드 박막의 몰리브덴 팁 전계 방출 소자 응용

  • 주병권 (KIST 정보재료.소자연구센터) ;
  • 정재훈 (대우고등기술연구원 전자재료연구실) ;
  • 김훈 (KIST 정보재료.소자연구센터) ;
  • 이윤희 (KIST 정보재료.소자연구센터) ;
  • 오명환 (KIST 정보재료.소자연구센터)
  • Published : 1999.02.01
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Abstract

Low-hydrogenated DLC films were coated on the Mo-tip FEAs by 'layer-by-layer' process based on the plasma-enhanced CVD method. The hydrogen content in the DLC film deposited by the 'layer-by-layer' process was appeared to be remarkably lowered through SIMS analysis. Also, the low-hydrogenated DLC-coated Mo-tip FEA showed good potentiality for FED applications in terms of turn-on voltage, emission current, emission stability and light emitting uniformity.

Keywords

References

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