대한전기학회논문지:전기물성ㆍ응용부문C (The Transactions of the Korean Institute of Electrical Engineers C)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

낮은 수소 함유량을 갖는 유사 다이아몬드 박막의 몰리브덴 팁 전계 방출 소자 응용

Application of Low-hydrogenated Diamond-like Carbon Film to Mo-tip Field Emitter Array

  • 주병권 (KIST 정보재료.소자연구센터) ;
  • 정재훈 (대우고등기술연구원 전자재료연구실) ;
  • 김훈 (KIST 정보재료.소자연구센터) ;
  • 이윤희 (KIST 정보재료.소자연구센터) ;
  • 오명환 (KIST 정보재료.소자연구센터)
  • 발행 : 1999.02.01
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초록

Low-hydrogenated DLC films were coated on the Mo-tip FEAs by 'layer-by-layer' process based on the plasma-enhanced CVD method. The hydrogen content in the DLC film deposited by the 'layer-by-layer' process was appeared to be remarkably lowered through SIMS analysis. Also, the low-hydrogenated DLC-coated Mo-tip FEA showed good potentiality for FED applications in terms of turn-on voltage, emission current, emission stability and light emitting uniformity.

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참고문헌

  1. Proc.IVMC'97 Enhancement of electron emission characteristics of platform-shaped Mo emitters by diamond-like carbon coatings C.M. Lin;F. Y.Chuang;J.T.Lai;C.H.Wang;T.Y.Hsiu;M. Yokoyama;I.N.Lin;J.H.Tsai;C.M.Huang;W.C. Wang
  2. Proc.IVMC'97 Effect of N-doping on the electron emission properties of DLC film on 2-inch Mo FEAs panel J.H.Jung;B.K.Ju;H.Kim;M.H.Oh;S.J.Chung;J. Jang
  3. Proc.IVMC'97 Electron emission characteristics of a-diamond coated field emitters C.B.Choi;M.Q.Ding;V.V.Zhirnov;A.F.Myers;J.J.Hren;J.J.Cuomo
  4. Appl.Phys.Lett. v.68 no.25 Deposition of hydrogen-free diamond-like carbon film by plasma enhanced chemical vapor deposition K.C.Park;J.H.Moon;S.J.Chung;J.Jang;M.H.Oh;W.I.Milne
  5. Appl.Phys.Lett. v.70 no.11 Deposition of n-type diamond-like carbon by using the layer-by-layer technique and its electron emission properties K.C.Park;J.H.Moon;S.J.Chung;J.Jang;M.H.Oh;W.I.Milne
  6. 전기전자재료학회논문지 v.11 no.7 몰리브덴 팁 전계 방출 소자의 제조 및 다이아몬드 상 카본의 코팅 효과 주병권;정재훈;김훈;이상조;이윤희;차균현;오명환
  7. Proc.IVMC97 Stability of field emission current for hydrogen-free diamond-like carbon films prepared by layer-by-layer technique J.H.Moon;S.J.Chung;W.I.Milne;M. H.Oh;J.Jang
  8. IEEE Electron Device Letter v.18 no.5 Enhancement of electron emission efficiency and stability of molybdenum-tip field emitter array by diamond like carbon coating J.H.Jung;B.K.Ju;Y.H.Lee;J.Jang;M.H.Oh
  9. 응용물리 v.11 no.1 DLC 증착에 의한 몰리브덴-팁 전계방출소자의 방출 효율과 안정성 개선에 대한 연구 정재훈;주병권;이윤희;장진;오명환
  10. Ph.D. Thesis, Kyung Hee University Effect of Hydrogen-free Diamond-like Carbon Coating on Molybdenum-tip Field Emitter Array J.H.Jung