대한전기학회논문지:전기물성ㆍ응용부문C (The Transactions of the Korean Institute of Electrical Engineers C)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

질소가 도핑된 DLC 막의 물성 조사 및 Mo-tip FEA 소자에의 응용

Investigation of Physical Properties of N-doped DLC Film and Its Application to Mo-tip FEA Devices

  • 주병권 (KIST 정보재료.소자연구센터) ;
  • 정재훈 (대우고등기술연구원 전자재료연구실) ;
  • 김훈 (KIST 정보재료.소자연구센터) ;
  • 이윤희 (KIST 정보재료.소자연구센터) ;
  • 이남양 (아주대학교 평판표시연구센터) ;
  • 오명환 (KIST 정보재료.소자연구센터)
  • 발행 : 1999.01.01
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초록

N-doped and low-hydrogenated DLC thin films were coated on the Mo-tip FEAs in order to improve the field emission performance and their electrical properties were evaluated. The fabricated devices showed improved field emission performance in terms of turn-on voltage, emission current and current fluctuation. This result might be caused both by the shift of Fermi level toward conduction band by N-doping and by the inherent stability of DLC material. Furthermore, the transconductance of the DLC-coated Mo-tip FEA and electrical conductivity and optical band-gap of the deposited DLC films were investigated.

키워드

참고문헌

  1. 전기전자재료학회지 v.11 no.7 몰리브덴 텝 전계 방출 소자의 제조 및 다이아몬드 상 카본의 코팅 효과 주병권;정재훈;김훈;이상조; 이윤희;차균현;오명환
  2. 전기학회지 (게재 예정) 낮은 수소 함유량을 갖는 유사 다이아몬드 박막의 몰리브덴팁 전계 방출 소자 응용 주병권;정재훈;김훈;이윤희;이남양;오명환
  3. Proc IVMC'97 Field electron emission from silicon tip arrays coated with nitrogen doped DLC film V.G.Litovchenko;A.A.Evtukh;N.I.Klyui;S.Yu;Kudzinovski;R.I.Marchenko;V.A.Semenovich
  4. Proc.IVMC'97 Field emission from nitrogen doped tetrahedral amorphous carbon prepared by filtered cathodic vacuum arc technique L.K.Cheah;S.Xu;B.K.Tay;Z.Sun
  5. Appl.Phys.Lett v.68 no.25 Deposition of hydrogen-free diamond-like carbon film by plasma enhanced chernical vapor deposition K.C.Park;J.H.Moon;S.J.Chung;J.Jang;M.H.Oh;W.I.Milne
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  7. Ph.D. thesis of Kyung Hee Univ. Effect of hydrogen-free diamond-like carbon coating on molybdenum-tip field emitter array J.H.Jung