초록
In this paper, a temperature controller for a semiconductor test handler is proposed. First, a handware system for identification and control is established using RTD sensors, an A/D converter, solid state relays, a heater, and a computer system. Second, using ARMAX model and least square method, a chamber model for the design of a controller is identified through experiments. The identified model is verified to describe the real plant very well in the sense that it shows very similar input-output responses to those of the real system. With the identified model an LQG controller is designed. Frequency response of the designed controller shows that it has 15 dB of gainmargin and (-50˚, +50˚) of phase margin. Experiment with a real test handler demonstrates a good performance in the sense that its overshoot and steady state error are smaller and response time is faster, compared with those of a conventional PID controller.
