The Transactions of the Korean Institute of Electrical Engineers A (대한전기학회논문지:전력기술부문A)

The Korean Institute of Electrical Engineers (대한전기학회)
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Development of a Temperature Controller for a Semiconductor Test Handler

반도체 테스트 핸들러를 위한 온도 제어기 개발

  • 조수영 (호서대 정보통신공학부 석사) ;
  • 김재용 (호서대 전기전자제어공학부) ;
  • 강태삼 (호서대 전기전자제어공학부) ;
  • 이호준 (호서대 정보통신공학부 석사) ;
  • 고광일 ((주)미래산업 연구소 연구소장)
  • Published : 1999.04.01
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Abstract

In this paper, a temperature controller for a semiconductor test handler is proposed. First, a handware system for identification and control is established using RTD sensors, an A/D converter, solid state relays, a heater, and a computer system. Second, using ARMAX model and least square method, a chamber model for the design of a controller is identified through experiments. The identified model is verified to describe the real plant very well in the sense that it shows very similar input-output responses to those of the real system. With the identified model an LQG controller is designed. Frequency response of the designed controller shows that it has 15 dB of gainmargin and (-50˚, +50˚) of phase margin. Experiment with a real test handler demonstrates a good performance in the sense that its overshoot and steady state error are smaller and response time is faster, compared with those of a conventional PID controller.

Keywords

References

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