플라즈마 이온주입

Plasma Source Ion Implantation

  • 전중환 (포항산업과학연구원 금속·코팅재료 연구팀)
  • 발행 : 1999.02.01

초록

키워드

참고문헌

  1. Materials Science and Engineering v.A116 J. R. Conrad
  2. Surf. & Coat.Technol. v.36 J. R. Conrad (et al.)
  3. J. Vac. Sci. Technol. v.B12 S. M. Malik (et al.)
  4. International Journal of Environmentally Conscious Design and Manufacturing v.2 J. R. Conrad (et al.)
  5. Surf. & Coat. Technol. v.82 A. Chen (et al.)
  6. Proc. Mater. Res. Soc. Symp. v.4 L. Xie (et al.)
  7. J. Vac. Sci. Technol. v.A8 J. R. Conrad (et al.)
  8. Ph. D. Thesis, University of Wisconsin-Madison M. B. Abuzriba (et al.)