참고문헌

1. Thin Film Processes J. A. Thornton;A. S. Penfold;J. L. Vossen(ed.);W. Kern(ed.)
2. Thin Solid Films v.40 S. Schiller (et al.)
3. J. Vac. Sci. Technol. v.46 J. A. Thornton
4. J. Vac. Sci. Technol. v.A4 B. Window;N. Savvides
5. Surf. Coat. Technol. v.48 W. D. Munz
6. Thin Solid Films v.193-194 S. L. Rohde (et al.)
7. Surf. Coat. Technol. v.59 R. D. Arnell
8. Surf. Coat. Technol. v.59 D. P. Monaghan (et al.)
9. Surf. Coat. Technol. v.57 X. Chu (et al.)
10. Surf. Coat. Sci. Technol. v.61 W. D. Sproul (et al.)
11. presented at 17th Int. Conf. on Metall. Coatings and Thin Films W. D. Munz
12. Physica C. v.104 J. E. Daadler
13. J. Phys. D:Appl. Phys. v.30 M. Keider (et al.)
14. US Patent 5 250 367 A. T. Santhanam (et al.)
15. Surf. Coat. Technol. v.39-40 E. Ertu가 (et al.)
16. J. Vac. Sci. Technol. v.13 W. D. Sproul (et al.)
17. J. Appl. Phys. v.72 D. J. Kester;R. Messier
18. Diamond Relat. Mater. v.2 D. R. McKenzie (et al.)