Journal of Sensor Science and Technology (센서학회지)
- Volume 8 Issue 3
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- Pages.274-282
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- 1999
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- 1225-5475(pISSN)
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- 2093-7563(eISSN)
Fabrication and Characteristics of ZnO:In Thin Film $NH_3$ Gas Sensor
ZnO:In 박막 $NH_3$ 가스센서의 제작 및 특성
- Kim, Jin-Hae (Dept. Electronic Materials Eng. and Research Center for Aircraft Parts Technology, Gyeongsang National University) ;
- Jun, Choon-Bae (Dept. of Electronic Eng., Yonam College of Eng.) ;
- Park, Ki-Cheol (Dept. Electronic Materials Eng. and Research Center for Aircraft Parts Technology, Gyeongsang National University)
- Published : 1999.05.31
Abstract
The In doped ZnO(ZnO:In)thin films sensitive to
암모니아가스에 민감한 In이 도핑된 ZnO(ZnO:In) 박막을 In 박막(
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