고속 정밀용 브러시 없는 리니어 직류 모터 개발

Development of a Brushless Linear DC Motor for High Speed and Precise Position Control

Recently, we have developed a linear brushless DC motor(LBLDCM) with high speed and precise position control performance to apply it to the semiconductor assembly and inspection machinery. It is composed of double side alignment by two armature-stator pairs and each pair is consist of a moving armature with 8 poles by 3 phase coils and a stator with rare earth permanent magnet (Nd-Fe-B) arrays. Through the thrust force analysis on a simplified and whole model of the suggested LBLDCM by an Electromagnetic FEM solver, skew angle of magnet arrays to reduce the thrust force ripple and the winding conditions of the armature is designed. From experimental results, the user's requirements was satisfied and we confirmed distinctly that the repeatable accuracy less than a micron of the linear motion can be obtained at high speed by the developed LBLDCM. This is owing to directly drive the work without the gear train.