Journal of the Korean Society for Precision Engineering (한국정밀공학회지)
- Volume 15 Issue 10
- /
- Pages.73-80
- /
- 1998
- /
- 1225-9071(pISSN)
- /
- 2287-8769(eISSN)
Development of a Brushless Linear DC Motor for High Speed and Precise Position Control
고속 정밀용 브러시 없는 리니어 직류 모터 개발
Abstract
Recently, we have developed a linear brushless DC motor(LBLDCM) with high speed and precise position control performance to apply it to the semiconductor assembly and inspection machinery. It is composed of double side alignment by two armature-stator pairs and each pair is consist of a moving armature with 8 poles by 3 phase coils and a stator with rare earth permanent magnet (Nd-Fe-B) arrays. Through the thrust force analysis on a simplified and whole model of the suggested LBLDCM by an Electromagnetic FEM solver, skew angle of magnet arrays to reduce the thrust force ripple and the winding conditions of the armature is designed. From experimental results, the user's requirements was satisfied and we confirmed distinctly that the repeatable accuracy less than a micron of the linear motion can be obtained at high speed by the developed LBLDCM. This is owing to directly drive the work without the gear train.
Keywords
- Linear motor;
- Linear brushless DC motor(LBLDCM);
- Thrust force;
- Moving armature(MA);
- Precise position control
- 리니어 모터;
- 없는 리니어 직류모터;
- 추력;
- 전기자가동형;
- 정밀 위치 제어;