• Journal of the Korean Society for Precision Engineering
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• v.25 no.3
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• pp.93-100
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• 2008

Laser interferometry is widely used as a measuring system in many fields because of its high resolution and ability to measure a broad area in real-time all at once. In conventional LASER interferometry, for example Out-of-plane ESPI(Electronic Speckle Pattern Interferometry), In plane ESPI, Shearography and Holography, it uses PZT or other components as a phase shift instrumentation to extract 3D deformation data, vibration mode and others. However, in most cases PZT has some disadvantages, which include nonlinear errors and limited time of use. In the present study, a new type of LASER interferometry using a laser diode is proposed. Using LASER Diode Sinusoidal Phase Modulating (LD-SPM) interferometry, the phase modulation can be directly modulated by controlling the LASER Diode injection current thereby eliminating the need for PZT and its components. This makes the interferometry more compact. This paper reports on a new approach to the LD Modulating interferometry that involves four-buckets phase shift method. This study proposes a four-bucket phase mapping algorithm, which was developed to have a guaranteed application, to stabilize the system in the field and to be a user-friendly GUI. In this paper, the theory for LD wavelength modulation and sinusoidal phase modulation of LD modulating interferometry is shown. Four-bucket phase mapping algorithm is then introduced.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.7
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• pp.65-72
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• 2009

Laser interferometry is widely used as a measuring system in many fields because of its high resolution and its ability to measure a broad area in real-time all at once. In conventional laser interferometry, for example out-of-plane ESPI (Electronic Speckle Pattern Interferometry), in plane ESPI, shearography and holography, it uses PZT or other components as a phase shift instrumentation to extract 3-D deformation data, vibration mode and others. However, in most cases PZT has some disadvantages, which include nonlinear errors and limited time of use. In the present study, a new type of laser interferometry using a laser diode is proposed. Using Laser Diode Sinusoidal Phase Modulating (LD-SPM) interferometry, the phase modulation can be directly modulated by controlling the laser diode injection current thereby eliminating the need for PZT and its components. This makes the interferometry more compact. This paper reports on a new approach to the LD (Laser Diode) Modulating interferometry that involves four-frame phase shift method. This study proposes a four-frame phase mapping algorithm, which was developed to have a guaranteed application, to stabilize the system in the field and to be a user-friendly GUI. In this paper, the theory for LD wavelength modulation and sinusoidal phase modulation of LD modulating interferometry is shown. Using modulating laser and research of measurement algorithm does comparison with existent ESPI measurement algorithm. Algorithm measures using GPIB communication through most LabVIEW 8.2. GPIB communication does alteration through PC. Transformation of measurement object measures through modulating laser algorithm that develops. Comparison of algorithm of modulating laser developed newly with existent PZT algorithm compares transformation price through 3-D. Comparison of 4-frame phase mapping, unwrapping, 3-D is then introduced.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.20 no.2
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• pp.564-574
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• 1996

This paper describes as Electronic Speckle Pattern Interferometry system which has been designed for measuring vibration patterns and quantitative measurement of vibration amplitude fields by using the time average method on a object. Visbility of fringe patterns is more improved by using the phase stepping and frame average method to reduce speckle and electric noise. And a bias vibration is introduced into the reference beam to shift the $\frac{2}{0}$ fringes so that fringe shift algorithms can be used to determine vibration amplitude. The experimental results are compared to those of the FFT analyzer and the FEM model analysis.

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.1767_1768
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• 2009

4-step 알고리즘을 이용하여 3차원 이미지 위상 정보를 분석하였다. Carre(1966)에 의하여 제시된 위상 분석 기술은 위상이동에 대하여 설명하고 있다. Wyant(1982)에 의한 4-step 알고리즘은 수많은 PSI(Phase-Shift Interferometry)법[1] 중에서 가장 일반적인 내용이다. 그러나 실험장비 설치 시, 매우 어렵다는 단점이 있다. 실험 과정에서 물체의 3차원 형상을 얻기 위해 매우 간단히 실험 설치를 하였다. 간섭 패턴은 추가적인 렌즈, 거울, 모터와 같은 광학장비 없이 랩뷰 프로그램과 비젼 시스템을 사용하여 구축하였다. 4-step method와 컴퓨터 프로그램에 의해 생성된 unwrapping image에 의해 물체의 wrapped된 이미지를 얻었다. 실험에 의하여 얻어진 간섭패턴을 분석 함으로써, 웨이브 프론트, 강도 그래프, 3차원 형상, 상수 데이터와 같은 다양한 정보를 얻을 수 있었다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.1079-1080
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• 2013

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.673-674
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• 2008

• Current Optics and Photonics
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• v.1 no.5
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• pp.505-513
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• 2017

Measuring the thickness of thin films is strongly required in the display industry. In recent years, as the size of a pattern has become smaller, the substrate has become larger. Consequently, measuring the thickness of the thin film over a wide area with low spatial sampling size has become a key technique of manufacturing-yield management. Interferometry is a well-known metrology technique that offers low spatial sampling size and the ability to measure a wide area; however, there are some limitations in measuring the thickness of the thin film. This paper proposes a method to calculate the thickness of the thin film in the following two steps: first, pre-estimation of the thickness with the phase at the peak position of the interferogram at the bottom surface of the thin film, using white-light phase-shift interferometry; second, accurate correction of the measurement by fitting the interferogram with the theoretical pattern through the estimated thickness. Feasibility and accuracy of the method has been verified by comparing measured values of photoresist pattern samples, manufactured with the halftone display process, to those measured by AFM. As a result, an area of $880{\times}640$ pixels could be measured in 3 seconds, with a measurement error of less than 12%.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.29A no.11
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• pp.62-69
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• 1992

In this paper, a measurement system of surface flatness test using 2-Bucket algorithm phase-shifting interferometry is designed and constructed. In the conventional surface flatness test system using phase shifting interferometry, it is needed more than 3 fringe datas but we propose 2-Bucket algorithm phase-shifting interferometry which only uses two fringe datas. 2-Bucket algorithm uses the relative phase differences of the neighbour pixels. If we watch the result of phase-shift error test simulation, 2-Bucket algorithm has the same calculating values that 3-Bucket, 4-Bucket and 5-Bucket algorithm have them. Experiments have been carried out on the silicon wafer. The measurement of silicon wafer's surface flatness shows that the flatness topography using 2-Bucket algorithm is similar to that of other algorithms.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.10a
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• pp.629-630
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• 2012

• Transactions of the Korean Society of Mechanical Engineers A
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• v.22 no.3
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• pp.684-687
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• 1998

The biggest problem common on to all forms of Phase Shift Interferometer is unwrapping the phase. Simple phase unwrapping algorithms assume that every pixel is within radians of its neighbors. If this is true, any reasonable algorithm will return the correct unwrapped phase. If not, correct unwrapped phase will not be obtained. In rough surface, frequently, neighboring pixels have phase steps greater than. This paper proposes the new method which makes phase steps smaller than by sub-pixel movement.