A Study on the Dynamic Modeling of a Hydrostatic Table

유정압 테이블의 동적 Modeling에 관한 연구

In this paper, a 3-DOF(Degree Of Freedom) rigid body model is developed for dynamic analysis of a hydrostatic table. The dynamic coefficients, stiffness and damping constant of each pad are calculated from the mass flow continuity condition. The validity of this model is examined in theoretical and experimental method. The dynamic behavior when mass unbalances and local variations of stiffness and damping of pads present is analyzed for real applications of hydrostatic table. Since the theoretical and experimental results show goof agreement. it can be said that the 3-DOF rigid body model is useful for the dynamic model of the table. The analysis reveals that the pitching motion is the dominant mode of vibration, It also reveals that unbalanced loads can increase amplitude of tilting motion and reduce natural frequencies and damping capacity of the hydrostatic table.