The Optimization of SONOSFET SPICE Parameters for NVSM Circuit Design

NVSM 회로설계를 위한 SONOSFET SPICE 파라미터의 최적화

  • 김병철 (광운대학교 공대 전자재료공학과) ;
  • 김주연 (광운대학교 공대 전자재료공학과) ;
  • 김선주 (광운대학교 공대 전자재료공학과) ;
  • 서광열 (광운대학교 공대 전자재료공학과)
  • Published : 1998.05.01

Abstract

In this paper, the extraction and optimization of SPICE parameters on SONOSFET for NVSM circuit design were discussed. SONOSFET devices with different channel widths and lengths were fabricated using conventional 1.2 um n-well CMOS process. And, electric properties for dc parameters and capacitance parameters were measured on wafer. SPICE parameters for the SONOSFET were extracted from the UC Berkeley level 3 model for the MOSFET. And, local optimization of Ids-Vgs curves has carried out in the bias region of subthreshold, linear, saturation respectively. Finally, the extracted SPICE parameters were optimized globally by comparing drain current (Ids), output conductance(gds), transconductance(gm) curves with theoretical curves in whole region of bias conditions. It is shown that the conventional model for the MOSFET can be applied to the SONOSFET modeling except sidewalk effect.

Keywords

References

  1. Jpn. J. Appl. Phys. v.21 no.SUP. 21-1 Scaling Down MNOS Nonvolatile Memory Devices Y. Yatsuda;T. Hagiwara;S. Minami;R. Kondo;K. Uchida;K. Uchiumi
  2. Solid-State Electronics v.30 Characterization of Charge Injection and Trapping in Scaled SONOS/MONOS Memory Devices Chao, C. -C.;White, M.
  3. Solid-State Electronics v.37 Scaling of Multidielectric Nonvolatile SONOS Memory Structures French, M. L.;White, M.
  4. 전자재료학회지 v.8 no.6 저전압 EEPROM을 위한 Scaled MONOS 비휘발성 기억소자의 제작 및 특성에 관한 연구 이상배;이상은;서광열
  5. 응용물리 v.9 no.6 저전압 NVSM을 위한 Scaled MONOS 구조의 블로킹 산화막-질화막 계면에 관한 연구 이상배;김선주;이성배;서광열
  6. Proc. of IEEE v.64 no.7 Nonvolatile Semiconductor Memory Devices Chang, J. J.