Crystallization Properites of $Te_x(Sb_{85}Ge_{15})_{100-x}$ Thin Film as Phase Change Optical Recording Media

$Te_x(Sb_{85}Ge_{15})_{100-x}$ 상변화 광기록 박막의 결정화 특성

  • 김홍석 (광운대학교 공대 전자재료공학과) ;
  • 이현용 (광운대학교 신기술연구소) ;
  • 정홍배 (광운대학교 공대 전자재료공학과)
  • Published : 1998.04.01

Abstract

In this study, we have investigated crystallization properties of $Te_x(Sb_{85}Ge_{15})_{100-x}$ (x=0.3, 0.5, 1.0) thin films prepared by thermal evaporation. The change of reflectance according to phase change from amorphous to crystalline phases with annealing and exposure of diode laser is measured b the n&k analyzer and the surface morphology between amorphous and crystalline phase is analyzed by SEM and AFM. The difference in reflectance($\DeltaR$) between amorphous and crystalline phase appears approximately 20% at the diode laser wavelength, 780nm in all prepared films. Especially, the reflectance difference,$\DeltaR$ comes up to about 30% in $Te_{0.5}(Sb_{85}Ge_{15})_{99.5}$ thin film. Also, amorphous-to-crystalline phase change is observed in all prepared films. As a result of the measurement of the reflectance using diode laser, the reflectance is increased in proportion to the laser power and exposure time in all films. As a result of observing each film with the SEM and AFM, the surface morphology of the annealed and the exposed films are evidently increased than those of as-deposited films. The fast crystallization is occurred by increasing in Te content. Therefore, we conclude that the $Te_{0.5}(Sb_{85}Ge_{15})_{99.5}$ and $Te_1(Sb_{85}Ge_{15})_{99}$ thin films can be evaluated as an attractive optical recording medium with high contast ratio and fast erasing time due to crystallization.

Keywords

References

  1. MRS BULLETIN R. J. Gambino
  2. J. Appl. Phys. v.32 no.11B M. Matsubara;H. Ohkawa;T. Yoshimaru;N. Yoshida;S. Koyahara
  3. SPIE Proceedings no.839 M. Ojima(et al.)
  4. J. Appl. Phys. v.24 T. Matsushita;A. Suzuki;M. Okuda.J.C. Rhee;H. Natio
  5. Jpn. J. Appl. Phys. v.64 S. Fujimori;S. Yagi;H. Yamazaki;N. Funakoshi
  6. Jpn. J. Appl. Phys. v.32 no.11B K. Uchino;K. Takada;T. Ohno;H. Yoshida;Y. Kobayashi
  7. Jpn. J. Appl. Phys. v.36 no.1B B.A.J. Jacobs;J.P.W.B. Duchateau
  8. 대한전기학회 v.38 no.2 Y.J. Lee;H.B. Chung(et. al.)
  9. Appl. Phys. no.A62 M.C. Morilla;C.N. Afonso;J. Solis
  10. Jpn. J. Appl. Phys. v.36 no.1B H. Mizuno;K. Takada;M. Horie
  11. SPIE Proceedings v.1078 T. Ohta(et al.)
  12. Appl. Phys. v.60(25) no.22 C.N. Afonso;J. Solis;F. Catalina
  13. Appl. Opt. v.27 D.J. Gravestein