전자공학회논문지D (Journal of the Korean Institute of Telematics and Electronics D)
- 제35D권5호
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- Pages.63-68
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- 1998
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- 1226-5845(pISSN)
보상용 브릿지를 이용한 압저항형 압력센서의 온도보상 방법
Temperature compensation method of piezoresistive pressure sensor using compensating bridge
초록
The absolute pressure sensor using SDB wafer has been fabricated. the structure of the sensor consists of two wheatstone bridges and a diaphragm. One of the two wheatstone bridges is located on the edge of diaphragm, and the other is located on the center of diaphragm. The diaphragm cavity is sealted in vacuum (~10
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