Korean Journal of Crystallography (한국결정학회지)
- Volume 8 Issue 1
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- Pages.20-25
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- 1997
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- 1229-8700(pISSN)
X-Ray Triple Crystal Diffraction Spectrometer and Its Applications
X-Ray Triple Crystal Diffraction Spectrometer의 제작과 그 응용
- Park Young-Han (Department of Physics, Dankook University) ;
- Yeom Byo-Young (Department of Physics, Dankook University) ;
- Yoon Hyng-Guen (Department of Physics, Dankook University) ;
- Min Suk-ki (Semiconductor Materials, Korea Institute of Science and Technology) ;
- Park Young Joo (Semiconductor Materials, Korea Institute of Science and Technology)
- Published : 1997.06.01
Abstract
Two experimental methods have been developed for high resolution measurement of x-ray scattering. The methods used were (1) an x-ray double crystal diffraction (DCD) spectrometer set-up and (2) an x-ray triple crystal diffraction (TCD) spectrometer set-up. With the DCD arrangement of Si(511)-sample(hkl), rocking curves have been plotted for Si (333), Si(004) and GaAs(004). Also, with the TCD arrangement of Si(111)-Si(111)-Si(511)-sample(hkl) including monolithic monocro-collimator and
고분해도의 X-선 산란을 위해 두 실험 방법이 개발됐다. 그 방법들은 (1) 2-결정 회절 스펙트로메터 (DCD)설치와 (2) 3-결정 회절 스펙트로메터 (TCD) 설치였다. Si(511)-시료(hkl)의 DCD배열로 Si(333), Si(004), GaAs(004)의 rocking curve를 그렸다. 또한 단일체 단색 평행기와
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