엑시며 레이저 펄스에 의해 여기된 광음향신호 분석

An Analysis of Photoacoustic Signals Excited by Excimer Pulsed Laser

본 논문에서 XeF, KrF 엑시머레이저 펄스에 의해 금속에서 여기되는 광음향신호를 PZT 변환기로 검출하여 광음향 변환 메카니즘과 지향성패턴을 분석하였다. 고체에서 레이저펄스에 의한 광음향 변환 매카니즘은 조사되는 레이저의 에너지밀도에 따라 열탄성영역과 플라즈마영역으로 나뉘며 두영역에서 서로 다른 양상을 보인다. 열탄성영역에서는 표면과 수평방향의 변위가 크고 플라즈마영역에서는 반사력으로 인해 수직방향의 변위가 크게 나타나는 것으로 모델링되며 이를 중심파장 480nm의 XeF엑시머레이저와 248nm의 KrFdprtlajfp이저를 사용하여 실험적으로 증명하였다. 또한 열탄성 영역에서 최대종파에너지는 $60^{\circ}$, 최대횡파에너지는 $30^{\circ}$부른에서 나타났고 플라즈마영역에서는 최대 종파와 횡파에너지가 각각 $0^{\circ},\;30^{\circ}$부근에서 나타나는 지향특성을 보였다.

In this paper, the PA(PhotoAcoustic) signals excited in metals by Xef, KrF excimer laser pulse were detected by a PZT transducer, and its transforming machanism and directivity patterns were analysed. The laser energy density in irradiation spot divides the PA trasnsorming machanism to be classified into thermoelastic and plasma regime, and the transforming machanisms in two regimes are different from each other. Based on theoretical model, it is predicted that shear wave is greater than longitudinal in the thermoelastic regime and longitudinal is greater than shear wave by reaction force in plasma regime. These predictions were verified through experiments by using of the XeF excimer pulsed laser of 480nm center-wavelength and the KrF excimer pulsed laser of 248nm. Also, for its directivity pattern, an arrival angle of the maximum longitudinal energy was around $60^{\circ}$ and maximum shear energy was around $30^{\circ}$ in the thermoelastic regime, and an arrival angle of maximum longitudinal energy was shown on nomal to the surface and maximum shear energy was represented in about $30^{\circ}$ in plasma regime.