Electrical & Electronic Materials (E2M - 전기 전자와 첨단 소재)
- Volume 10 Issue 7
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- Pages.668-673
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- 1997
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- 2982-6268(pISSN)
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- 2982-6306(eISSN)
Laser-Induced Thermochemical Wet Etching of Mn-Zn Ferrite
Mn-Zn 페라이트의 레이저 유도 열화학 습식식각
초록
A Single-crystalline Mn-Zn Ferrite (110 orientation) was masklessly etched by focused Ar laser irradiation in an H