한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)
- 제14권12호
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- Pages.114-120
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- 1997
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- 1225-9071(pISSN)
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- 2287-8769(eISSN)
능동제어모세관을 이용한 유정압테이블의 운동정도 향상
Improvement of Motion Accuracy Using Active Controlled Capillary in Hydrostatic Table
초록
For compensating the error motion of hydrostatic tables, we have introduced a way that the clearance of table is controlled corresponding to the amount of eror with the actively controlled variable capillary, named as ACC. In previous paper, through the basic test, it was confirmed that by the use of ACC, the error motion within 2.7
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