Journal of Sensor Science and Technology (센서학회지)
- Volume 6 Issue 4
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- Pages.337-345
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- 1997
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- 1225-5475(pISSN)
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- 2093-7563(eISSN)
Fabrication of Low Power Micro-heater for Micro-Gas Sensor I. The Thermal Distribution Analysis by The Finite Element Method
마이크로 가스센서를 위한 저전력 마이크로 히터의 제조 I. 유한요소법에 의한 열분포해석
- Chung, Wan-Young (Dept. of Electronic Engineering, Semyung University) ;
- Lim, Jun-Woo (School of Electronic and Electrical Engineering, Kyungpook National University) ;
- Lee, Duk-Dong (School of Electronic and Electrical Engineering, Kyungpook National University) ;
- Yamazoe, Noboru (Dept. of Materials Science and Technology, Kyushu University)
- Published : 1997.07.31
Abstract
The micro heater with PSG/
마이크로 가스센서 제조를 위해 PSG/
Keywords