E2M - 전기 전자와 첨단 소재 (Electrical & Electronic Materials)
- 제9권3호
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- Pages.270-276
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- 1996
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- 2982-6268(pISSN)
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- 2982-6306(eISSN)
마이크로파 플라즈마 화학기상성장법에 의해 (110)면으로 배향된 다이아몬드막의 합성
Synthesis of (110) oriented diamond films by microwave plasma enhanced chemical vapor deposition
초록
As methane concentration was varied, the textures of diamond films deposited on Si(100)substrate were observed by XRD,SEM and Raman spectroscope. As a result,