The Korean Journal of Ceramics

The Korean Ceramic Society (한국세라믹학회)
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Fabrication and Characteristics of High-performance Doped-$SnO_2$ Thin Films for Explosive Gas Sensor

  • Chwa, Sang-Ok (Department of Inorganic Materials Engineering, Pusan National University) ;
  • Park, Hee-Chan (Department of Inorganic Materials Engineering, Pusan National University) ;
  • Kim, Kwang-Ho (Department of Inorganic Materials Engineering, Pusan National University)
  • Published : 1996.06.01
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Abstract

Long term stability, sensitization in air, and gas sensing behaviors of tin oxide films were investigated with doping of antimony and palladium. The tin oxide films were prepared on a Corning glass by reactive rf sputtering method and tested for detection of hydrogen gas. Sb-doping improved a long-term stability in the base resistance of $SnO_2$ film sensor. A small amount of Pd doping caused the optimum sensor operating temperature to reduce and also enhanced the gas sensitivity, compared with the undoped $SnO_2$ film. Gas sensitivity depended largely on the film thickness. The important sensitization reactions for sensor operating were $(O_{2ads})+e^-\;{\rightarrow}\;2(O_{ads})^-$ on the surface of $SnO_2$ film at elevated temperature in air and a followed reaction of hydrogen atoms with $(O_{ads})^-$ ions.

Keywords

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