Fabrication and Characterization of Sol-Gel Ternary Titanium Silicate Waveguides

  • Junmo Koo (Lab. of Optical Materials and Coating (LOMC) Dept. of Materials Science and Engineering Korea Advanced Institute of Science and Technology (KAIST)) ;
  • Han, Sang-Soo (Lab. of Optical Materials and Coating (LOMC) Dept. of Materials Science and Engineering Korea Advanced Institute of Science and Technology (KAIST)) ;
  • Bae, Byeong-Soo (Lab. of Optical Materials and Coating (LOMC) Dept. of Materials Science and Engineering Korea Advanced Institute of Science and Technology (KAIST))
  • Published : 1996.06.01

Abstract

Aluminum and zinc titanium silicate sol-gel films were fabricated for application of waveguide and the effect of additions of ZnO and $Al_2O_3$ to binary titanium silicate films was investigated. During firing, the films are densified as they shrunk and their refractive index increases in the range of 1.58-1.83 depending on the film composition. The attenuation of the waveguides is not sensitive to changes in composition except for zinc titanium silicate waveguides which have substantially higher attenuation. However, the increase in the attenuation with aging of the waveguides depend upon the composition of waveuides. The addition $Al_2O_3$ or the reduced $SiO_2$ content in the composition appears to slow the deterioration of the waveguides due to the formation of more stable bonds and increased acidity on the film surface. Also, the wavelength dependence of the attenuation of the waveguides varies with composition. The attenuation of the waveguides except for the $65SiO_2{\cdot}35TiO_2$ composition are not Rayleigh scatter limited, suggesting the absorption loss of the waveguides due to the effects of residual carbon and structural defects in the films.

Keywords

References

  1. Chemical Processing of Advanced Materials Sol-Gel Processing of Passive Components for Integrated Optics B. J. J. Zelinski;B. D. Fabes;L. Weisenbach;T. C. Zaugg;L. L. Hench(ed.);J. K. West(ed.)
  2. Apl., Opt. v.15 Embossing Technique for Fabricating Surface Relief Gratings on Hard Oxide Waveguides K. Heuberger;W. Lukosz
  3. SPIE Proc. v.401 Preparation of Planar Optica $SiO_2-TiO_2$ and $LiNbO_3$ Waveguides with a Dip Coatings Method and an Embossing Technique for Fabricating Grating Couplers and Channel Waveguides K. Tiefenthaler;V. Briguet;E. Buser;M. Morisberger;W. Lukosz
  4. Opt. Lett. v.8 Embossing Technique for Fabricating Integrated Optical Components in Hard Inorganic Waveguideing Materials W. Lukosz;K. Tiefenthaler
  5. SPIE Proc. v.1513 Planar and Strip Optical Waveguides by Sol-Gel Method and Laser Densification M. Guglielmi;Colombo;L. M. D. Expositi;G. C. Righini;S. Pelli
  6. MRS Symp. Proc.;Better Ceramics Through Chemistry v.180 Processing of $SiO_2-TiO_2$ Thin Film Waveguides L. Weisenbach;T. L. Davis;B. J. J. Zelinski;R. L. Roncone;L. A. Weller-Brophy;B. J. J. Zelinski(ed. et al.)
  7. SPIE Proc. v.1590 The Influence of Processing Variables on the Optical Properties of $SiO_2-TiO_2$ Planar Waveguides L. Weisenbach;B. J. J. Zelinski;J. O'Kelly;J. Morreale
  8. Phys. Chem. Glasses. v.13 Effect of Third Components upon the Immiscibility of Binary Glass K. Nakagawa;T. Izumitani
  9. J. Am. Ceram. Soc. v.56 Effect of Minor Third Components on Metastable Immiscibility Boundaries of Binary Glasses M. Tomozawa;R. A. Obra
  10. J. Am. Ceram. Soc. v.57 Miscibility Gaps in Alkali-Silicate Binaries-Data and Thermodynamic Interpretations W. Haller;D. H. Blackburn;J. H. Simmons
  11. J. Mat. Res. Effect of Heat Treatment on Formation of Sol-Gel (Pb, La)TiO₃ Films for Optical Application J. Koo;D. S. Yoon;K. No;B. S. Bae
  12. J. Phys. Chem. v.61 The Infrared Spectra of Some Ti-O-Si, Ti-O-Ti and Si-O-Si Compounds V. A. Zeitler;C. A. Brown
  13. J. Non-Cryst. Solids v.89 Infrared Reflectivity Spectroscopy of Silicate Glasses F. Geravis;A. Blin;D. Massiot;J. P. Coutures;M. H. Chopinet;F. Naudin
  14. Bull. Chem. Soc. Japn. v.44 The Surface Properties of the Silica-Titania System Prepared by the Hydrolysis of Metal Alkoxides H. Hosaka;K. Meguro
  15. Phil. Mag. v.35 The Electrical and Optical Properties of Amorphous Carbon Prepared by the Glow Discharge Techniques D. A. Anderson
  16. J. Non-Cryst. Solids v.71 The Optical Absorption and Luminescence Bands Near 2eV in Irradiated and Drawn Synthetic Silica E. J. Friebele;D. L. Griscom;M. J. Marrone
  17. J. Non-Cryst. Solids v.82 Structural Investigation of $TiO_2-SiO_2$ Glassy and Glass-Ceramic Materials Prepared by the Sol-Gel Method M. Emili;L. Incoccia;S. Mobilio;G. Fagherazzi;M. Guglielmi