Evaluation on the Driving Characteristics of a Precise Actuator Using Piezoelectric Elements

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A prototype of a linear piezoelectric actuator is developed and its dynamic behaviors are investigated. The actuator consists of a driving tip with two stacked piezoelectric elements and a slider. Dynamic characteristics of slider over various vibration lici of the driving tip and changes of normal force acting on the vibratory tip are examined through experiments. The moving direction of slider can be controlled by changing a phase angle between input signals applied to piezoelectric elements. A change of phase difference between input signals also have a great influence on the vibration locus of driving tip. Changes of slider motion due to different vibration loci are examined by experiments.