한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)
- 제12권2호
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- Pages.48-58
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- 1995
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- 1225-9071(pISSN)
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- 2287-8769(eISSN)
압전전압 궤환에 의한 미세구동 연삭테이블의 개발
A Development of Micro-Positioning Grinding Table using Piezoelectric Voltage Feedback
초록
A micro positioning system using piezoelectric actuators have very wide application region such as ultra-precision machine tool, optical device, measurement systen. In order ro keep a high precision displacement resolution, they use a position sensor and feedback the error. From the practical point of view, a high-resolution displacement sensor system are very expensive and difficult to guarantee such sensitive sensors work properly in the hard opera- tion environment of industry. In this study, a micro-positioning grinding table which does not require position sensor but uses piezoelectric voltage feedback, has been developed. It is driven by hystersis-considering reference input voltage which calculated from computer and then uses actuator/sensor characteristics of piezoelectric materials. From the result of experiments we proved a fast and stable response of micro-positioning system and suggested efficient technique to control the piezoelectric actuator. And through grinding experiments, it is revealed that a characteristics of ground surfaces transient to plastic deformation as extremely small depth of grinding.
키워드