대한기계학회논문집 (Transactions of the Korean Society of Mechanical Engineers)
- 제19권2호
- /
- Pages.418-426
- /
- 1995
- /
- 1225-5963(pISSN)
DOI QR Code
기포형성에 의한 마이크로 액추에이터의 구동기구 해석
Analysis on Actuation Mechanism of Micro Actuator by Bubble Formation
초록
A bubble-powered microactuator is designed conceptually. And the actuation mechanism due to bubble growth and collapse is studied numerically and analytically. In this analysis, it is estimated that the time lag for bubble formation on micro line heater, the duration of the bubble growth and collapse and the pressure change in actuator due to the bubble evolution. Based on these calculations, the actuator control scheme is visualized. This actuator may be applicable to the system which needs to pump liquid correctly and regularly.
키워드