전자공학회논문지A (Journal of the Korean Institute of Telematics and Electronics A)
- 제31A권10호
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- Pages.108-113
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- 1994
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- 1016-135X(pISSN)
구리 금속선의 산화 방지를 위한 알루미늄 박막의 산화 방지 특성
Characteristics of the aluminum thisn films for the prevention of copper oxidation
초록
The characteristics of the oxidation prevention layers for the copper metallization were investigated. The thin films such as Cr, TiN and Al were used as the oxidation prevention layers for copper. Ultra thin aluminum films were found to prevent the oxidation of copper up to the highest oxidation annealing temperature among the barrier layers examined in this study. It was found that oxygen did not diffuse into copper through aluminum films because of the aluminum oxide layer formed on the aluminum surface and the ultra thin aluminum film could be a good oxidation barrier layer for the copper metallization.
키워드