Journal of the Korean Magnetics Society (한국자기학회지)
- Volume 4 Issue 4
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- Pages.319-325
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- 1994
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- 1598-5385(pISSN)
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- 2233-6648(eISSN)
Influence of Target Manufacturing Condition on the Coercive Force and Effective Permeability of Permalloy
타게트 제조조건이 퍼멀로이 박막의 보자력 및 투자율에 미치는 영향
Abstract
Permalloy films were deposited by an RF magnetron sputtering method using several different targets which had been cold-rolled and annealed at various temperatures to give different microstructure and texture. The grain refinement occurs at high temperature annealing due to recrystallization and subsequently the initial (110) target texture transforms to the random texture. The coercive forces of thin films fabricated using targets which are not recrystallized are below 0.2 Oe in the AI pressure range of 1~5 mTorr and the lowest coercive force achieved is 0.07 Oe. The low value of coercive force, 0.25 Oe, is only obtained at the sputtering conditions of 400 W and 1 mTorr, and 300 W and 5 mTorr when recrystallized targets are used. The internal stress changes from compressive to tensile as the Ar pressure increases, the stress-free being at 5 mTorr. The changes of coercive force and permeability can be well interpreted by the differences from the composition and the internal stress.
제조조건이 다른 여러 퍼멀로이 합금 타게트를 사용하여 RF 마그네트론 스퍼터링법에 의해 퍼멀로이(NiFe) 박막을 증가시킬 경우 타게트의 제조조건이 박막의 자기특성에 미치는 영향을 조사하 였다. 타게트를 온도에서 어닐링한 결과
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