Abstract
We have investigated the effects of deposition angle on magnetic and magneto-optic properties in Co/Pt multilayer thin films. which were prepared bye-beam evaporation on tilted substrates. with varying tilt angle from $0^{\circ}$ to $60^{\circ}$. The structure of the specimens was examined by x-ray diffractometer and scanning electron microscope. and the magnetic and magneto-optical properties were measured by VSM, torque magnetometer, and Kerr loop tracer. X-ray diffractometry revealed that all of the specimens had multilayer structure and growth orientation of column followed the tangent rule but the crystallograpic orientation, <111>, was slightly deviated from the substrate normal even though the deposition angle was increased up to $60^{\circ}$. A decrement of the magnetization and Kerr angle with the deposition angle was related with that of the film density due to increasing porosity. The perpendicular mag¬netic anisotropy was also decreased with increasing the deposition angle.
전자빔 증착 Co/Pt 다층박막에서 증발원자의 입사방향이 자기 및 자기광학적 성질에 미치는 영향을 조사하였다. 조성변조 Co/Pt 다층박막을 증발원자의 입사방향이 $0^{\circ},\;15^{\circ},\;30^{\circ},\;45^{\circ},\;60^{\circ}$이 되도록 하여 전자빔 증착법으로 제조한 후 x-ray 회절실험, 주사전자현미경으로 구조분석을 하였고, VSM, torque magnetometer, Kerr loop tracer를 사용하여 자기 및 자기광학적 성질을 조사하였다. x-ray 회절실험을 통해 모든 시료가 조성변조 다층박막 구조로 만들어졌음을 확인하였고, 입사각이 증가함에 따라 주상구조의 성장방향은 기판 수직선에서 벗어나지만 <111> 결정방향은 기판 수직선 가까이에 존재함이 관찰되었다. 포화자화값 $M_{s}$, Kerr회전각 ${\theta}k$는 입사각이 증가하면 줄어들었는데 이는 박막의 밀도 감소 때문이다. 자기이방성 또한 입사각의 증가에 따라 줄어들었다.