Journal of Sensor Science and Technology (센서학회지)
- Volume 2 Issue 1
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- Pages.19-27
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- 1993
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- 1225-5475(pISSN)
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- 2093-7563(eISSN)
Silicon Capacitive Pressure Sensor for Low Pressure Measurements
저 압력 측정을 위한 실리콘 용량형 압력센서
- Seo, Hee-Don (Dept. of Electrical & Electronic Eng., Toyohashi Univ. of Technology) ;
- Lee, Youn-Hee (Dept. of Electronic Communication, Yeungjin College) ;
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Park, Jong-Dae
(Dept. of Electronics, Yeungnam Univ.) ;
- Choi, Se-Gon (Dept. of Electronics, Yeungnam Univ.)
- Published : 1993.08.28
Abstract
Capacitive pressure sensor for low pressure measurements has been fabricated by using
본 논문은
Keywords