초청정 클린룸의 공기이온화에 대한 실험적 연구

Experimental Study on Air Ionization Phenomena in the Super Clean Room

Experimental study on air ionization phenomena has been conducted to analyze the propagation behavior and dischargeability of polarity air ions under the super clean room environments with the operation of prototype of Air Ionization System. Varying humidity and air velocity, the distribution of air ion density and the discharge time are measured and analyzed.