Journal of the Korean Magnetics Society (한국자기학회지)
- Volume 2 Issue 3
- /
- Pages.251-256
- /
- 1992
- /
- 1598-5385(pISSN)
- /
- 2233-6648(eISSN)
A Study on the Perpendicular Magnetic Anisotropy in Co/Pd artificial Superlattices Prepared by RF Magnetron Sputtering
고주파 마그네트론 스퍼터링에 의해 형성된 Co/Pd 인공초격자의 수직자기이방성에 관한 연구
- Park, Ju-Uk (Dept. Metallurgical Engineering, Seoul National University Electronic Materials Laboratory, Center for Advanced Materials Research) ;
- Ju, Seung-Gi (Dept. Metallurgical Engineering, Seoul National University Electronic Materials Laboratory, Center for Advanced Materials Research)
- Published : 1992.11.01
Abstract
Artificial superlattices of Co/Pd were prepared by RF magnetron sputtering Multilayered structure and compositional modulation were analyzed with a side angle x-ray diffractometer. It has been found that expansion of Co lattice occured in this artificial superlattice due to the lattice mismatch between Co and Pd. Perpendicular magnetic anisotropy could be observed when the Co layer thickness became less than 8
고주파 마그네트론 스퍼터링에 의해 Co /Pd 인공초격자를 형성하였다. 형성시킨 Co /Pd 인공초격자의 조성변조를 소각 X-선회절 분석으로 확인하였으며, XRD 분석 결과 두 원소의 격자상수 차이로 인해 Co 격자 팽창이 일어남을 알 수 있었다. Co 층 두께가 8
Keywords