Analysis of Magnetic Flux Density in Electro-Magnetic Chucks

전자척에서 자속밀도 해석에 관한 연구

The distribution of magnetic flux density of electro-magnetic chucks may clarify the clamping characteristics which are strongly related to the machining efficiency and machining accuracy in a surface grinder. Therefore the distribution of the normal and the tangential components of magnetic flux density has been analyzed theoretically. It appears that the normal and the tangential components of magnetic flux density increase as the ratio of the separator width to the pitch e/p decreases. The results seem to increase the uniformity and stability of normal component of magnetic flux density for the decreased e/p.