Journal of Sensor Science and Technology (센서학회지)
- Volume 1 Issue 2
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- Pages.101-106
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- 1992
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- 1225-5475(pISSN)
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- 2093-7563(eISSN)
Fabrication and Characteristics of FET Type Semiconductor Urea and Glucose Sensor Employing Photolithography Techniques
사진식각기술을 이용한 FET형 반도체 요소 및 포도당센서의 제조와 그 특성
- Cho, Byung-Woog (Dept. of Electronics, Kyungpook Nat'l Univ.) ;
- Kim, Chang-Soo (Sensor Technology Research Center, Kyungpook Nat'l Univ.) ;
- Seo, Hwa-Il (Sensor Technology Research Center, Kyungpook Nat'l Univ.) ;
- Sohn, Byung-Ki (Dept. of Electronics, Kyungpook Nat'l Univ.)
- Published : 1992.11.30
Abstract
pH-ISFETs, the semiconductor pH sensors, were combined with immobilized enzyme membranes to prepare FET type urea and glucose sensors and its operational characteristics were investigated. Photolithography techniques were applied to immobilize enzymes on the
반도체 pH 센서인 pH-ISFET와 효소 고정화막을 기술적으로 결합한 FET형 반도체 요소 및 포도당센서를 제조하고 그 동작특성을 조사하였다. 사진식각기술을 이용하여 pH-ISFET의 수소이온 감지막 위에 urease와 glucose oxidase를 감광성 고분자 물질인 PVA(polyvinyl alcohol)-SbQ(stilbazolium group)로 고정화(immobilization)시켰다. 제조된 요소센서와 포도당센서는 각각
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