Synthesis and Photocharacteristics of Polysiloxane substituted Naphthoquinone-1,2-diazide sulfonyl group

Naphthoquinone-1,2-Diazaide-Sulfonyl기 치환 Polysiloxane의 합성과 그 감광특성

Polysiloxane copolymers were prepared by copolymerizing hexamethylcyclotrisiloxane with tetramethylcyclotetrasiloxane, and then reacted with allyamine. Copolymers containing naphthoquinone-1,2-diazide-5-sulfonyl group were synthesized by reacting naphthoquinone-1,2-diazide-5-sulfonyl chloride with siloxane copolymers having amino group. Thermal decomposition temperatures of copolymers were $360{\sim}450^{\circ}C$, and photosensitive characteristics were dependent on the molecular weights of backbone resins and sensitizers. Sensitivity of copolymers was $50{\sim}120mJ/cm^2$ and contrast(${\gamma}$) was 1.4~2.1.

Hexamethylcyclotrisiloxane($D_3$), tetramethylcyclotetrasiloxane(TMCTS)을 공중합 시켜 Si-H 결합을 함유한 polysiloxane 공중합체를 합성하고 allylamine과 반응시켜 amino 기를 도입시킨후 naphthoquinone-1,2-diazide-5-sulfonyl chloride 와 반응시켜 naphthoquinone-1,2-diazide-5-sulfonyl 기가 도입된 polysiloxane을 합성하였다. 생성 공중합체의 열적특성을 측정한 결과, 열분해온도는 $360{\sim}450^{\circ}C$ 정도였으며 또한 감광특성은 backbone 수지의 분자량이나 증감제의 종류에 따라 영향을 받았다. Sensitivity는 $50{\sim}120mJ/cm^2$였고 contrast(${\gamma}$)는 1.4~2.1였으며 backbone 수지의 분자량이 증가함에 따라 약간 감소하였다.