최적화 기법에 의한 다결정 TFT(Thin Film Transistor)의 매개 변수 추출

The Parameters Extraction in Poly TFT Using Optimization Technique

  • 김홍배 (청주대 이공대 반도체공학과) ;
  • 손상희 (청주대 이공대 반도체공학과) ;
  • 박용헌 (공군사관학교 물리과)
  • 발행 : 1991.06.01

초록

We used Cd Se as the semiconductor to analyze the Poly-TFT. Cd Se TFT is fabricated by the vacuum evaporation method and the characteristics curves of the current-voltage are obtained using the results of measurement of Cd Se TFT devices. Employing least square method and Rosenbrock algorithm, we can extract the device parameters(grain boundary mobility, trap density). The current-voltage relations calculated by extracted parameters are in good agreement with experimental results.

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