PECVD에 의한 TiN 코팅의 마모특성 연구

Wear Characteristics of TiN Coating by Plasma Enhanced CVD

An experimental programme was established to determine the wear behaviour of TiN coatings of thickness 1 $\mu$m and 3 $\mu$m. by PECVD with the variation of applied load, sliding velocity and sliding distance. It was shown that oxidation of transferred metal as sliding speed increased formed oxide film so that it contributed in decreasing the wear rate. With the roller-on-disc tribometer employed, the wear rate of the roller specimen was decreased with the increase in sliding distance due to the reduction in effective contact pressure. Finally, the severe cracks concentrated at the trailing edge of contact surface were explained in terms of high tensile stress prevailing at the trailing edge of the contact and were identified as a dominant wear mechanism as well as the strong local welding between coating layer and the counter surface, leading to the debonding of the coating layer.