클린룸의 상부 플레넘 설계를 위한 유동특성 실험

Airflow Characteristic Experiments for the Upper Plenum Design of Clean Room

The airflow characteristics in both the upper plenum and the clean space of clean room are investigated by measuring the pressure distribution of the upper plenum and the velocity profile in the clean space, at the various conditions of the supplied airflow rate, the volume of upper plenum and the air supply type. The performance of vertical air supply type and horizontal air supply type is analyzed in terms of the airflow uniformity which is frequently used in indicating the clean room performance, and the relations among the volume of upper plenum, the supplied airflow rate and the airflow uniformity are confirmed. The results of this experimental study can be applied to the designing of the upper plenum of clean room.