Journal of the Korean Institute of Telematics and Electronics (대한전자공학회논문지)
- Volume 25 Issue 11
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- Pages.1323-1328
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- 1988
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- 1016-135X(pISSN)
Nitridation of Thin $SiO_2$ Film
$SiO_2$ 薄膜의 熱的 窒化
- Lee, Yong-Soo (Dept. of Elec. Eng., Kyungpook Nat'l Univ.) ;
- Lee, Yong-Hyun (Dept. of Elec. Eng., Kyungpook Nat'l Univ.) ;
- Sohn, Byung-Ki (Dept. of Elec. Eng., Kyungpook Nat'l Univ.)
- Published : 1988.11.01
Abstract
Thermally grown
Keywords