대한전자공학회논문지 (Journal of the Korean Institute of Telematics and Electronics)
- 제23권1호
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- Pages.120-125
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- 1986
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- 1016-135X(pISSN)
DLTS 시스템에서의 신호처리에 관한 연구
A Study on the Data Analysis Systems in Deep Level Transient Spectroscopy
- 임한조 (아주대학교 공과대학 전자공학과) ;
- 이우용 (아주대학교 공과대학 전자공학과) ;
- 최연익 (아주대학교 공과대학 전자공학과) ;
- 정상구 (아주대학교 공과대학 전자공학과) ;
- 김현남 (아주대학교 공과대학 전자공학과)
- Lim, H. (Dept. Elec. Eng., Ajou Univ.) ;
- Lee, W.Y. (Dept. Elec. Eng., Ajou Univ.) ;
- Choi, Y.I. (Dept. Elec. Eng., Ajou Univ.) ;
- Chung, S.K. (Dept. Elec. Eng., Ajou Univ.) ;
- Kim, H.N. (Dept. Elec. Eng., Ajou Univ.)
- 발행 : 1986.01.01
초록
Data analysis methods in lock-in amplifier based DLTS systems were discussed with regards to the signal-to-noise ratio and improvement of resolution of DLTS spectrum. The DLTS system based on wideband two-phase lock-in amplifier is shown to be the most preferabe for the studies in deep levels of low concentration. A single-temperature scanning DLTS methods in lock-in amplifier based system with the improved sensitivity is proposed. The method is tested on the characterization of deep levels in n-GaAs.
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