Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2016.02a
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- Pages.344.1-344.1
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- 2016
Direct synthesis of Graphene/Boron nitride stacked layer by CVD on Cu foil
- Moon, Youngwoong (School of Electrical and Electronic Engineering, Yonsei University) ;
- Park, Jonghyun (School of Electrical and Electronic Engineering, Yonsei University) ;
- Park, Sijin (School of Electrical and Electronic Engineering, Yonsei University) ;
- Kim, Hyungjun (School of Electrical and Electronic Engineering, Yonsei University) ;
- Hwang, Chanyong (Center for Nanometrology, Korea Research Institute of Standard and Science)
- Published : 2016.02.17
Abstract
Recently, graphene has shown great characteristic of electrical conductivity, strength, and elasticity. However, due to edge unstable and metallic properties, it is difficult to use as a semiconductor devices. The solution of such problems has been sought a way to use the boron nitride in a stacked layer structure. By graphene and boron nitride stacked layer structure on silicon substrate, the electron mobility is improved and deteriorated results in semiconductor properties. In this study, to make layered structure, we developed direct synthesis method for graphene on boron nitride. By using Raman technique, the directly stacked layer structure is in good agreement with measurements on each of the attributes.