Proceedings of the Korean Society for Noise and Vibration Engineering Conference (한국소음진동공학회:학술대회논문집)
- 2014.10a
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- Pages.79-83
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- 2014
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- 1598-2548(pISSN)
Characteristic analysis and design of a precise manipulation device using surface acoustic wave
표면탄성파를 이용한 이송장치의 IDT 형상 변화에 따른 특성 연구
- Published : 2014.10.29
Abstract
In this paper, SAW devices are fabricated using various IDT shape(Single/Double) to check an effect of the IDT on SAW device. And based on theory of a particle velocity moved by SAW and IDT, a particle velocity is measured and calculated. Depend on insert power, a particle velocity using Single-IDT SAW device is about two times bigger than Double-IDT SAW device and it's almost same with a theoretical different.