Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2014.02a
- /
- Pages.352.1-352.1
- /
- 2014
Optimization of Amorphous Indium Gallium Zinc Oxide Thin Film for Transparent Thin Film Transistor Applications
- Shin, Han Jae (3D Research Development Team, Gumi Electronics & Information Technology Research Institute) ;
- Lee, Dong Ic (3D Research Development Team, Gumi Electronics & Information Technology Research Institute) ;
- Yeom, Se-Hyuk (3D Research Development Team, Gumi Electronics & Information Technology Research Institute) ;
- Seo, Chang Tae (3D Research Development Team, Gumi Electronics & Information Technology Research Institute)
- Published : 2014.02.10
Abstract
Indium Tin Oxide (ITO) films are the most extensively studied and commonly used as ones of TCO films. The ITO films having a high electric conductivity and high transparency are easily fabricated on glass substrate at a substrate temperature over