Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
권호 표지

Optimization of GZO/Ag/GZO Multilayer Electrodes Obtained by Pulsed Laser Deposition at Room Temperature

  • Cheon, Eunyoung (Department of Electrical Engineering, Korea University) ;
  • Lee, Kyung-Ju (Department of Electrical Engineering, Korea University) ;
  • Song, Sang Woo (Department of Electrical Engineering, Korea University) ;
  • Kim, Hwan Sun (Department of Electrical Engineering, Korea University) ;
  • Cho, Dae Hee (Department of Electrical Engineering, Korea University) ;
  • Jang, Ji Hun (Department of Electrical Engineering, Korea University) ;
  • Moon, Byung Moo (Department of Electrical Engineering, Korea University)
  • Published : 2014.02.10
Download PDF
⟨ Previous Next ⟩

Abstract

Indium Tin Oxide (ITO) thin films are used as the Transparent Conducting Oxide (TCO), such as flat panel display, transparent electrodes, solar cell, touch screen, and various optical devices. ZnO has attracted attention as alternative materials to ITO film due to its resource availability, low cost, and good transmittance at the visible region. Recently, very thin film deposition is important. In order to minimize the damage caused by bending. However, ZnO thin film such as Ga-doped ZnO(GZO) has poor sheet resistance characteristics. To solve this problem, By adding the conductive metal on films can decrease the sheet resistance and increase the mobility of the films. In this study, We analyzed the electrical and optical characteristics of GZO/Ag/GZO (GAG) films by change in Ag and GZO thickness.

Keywords