한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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- Pages.367-367
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- 2013
Properties of Indium Tin Oxide Multilayer Fabricated by Glancing Angle Deposition Method
- Oh, Gyujin (Department of Physics, Hanyang University) ;
- Lee, Kyoung Su (Department of Physics, Hanyang University) ;
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Kim, Eun Kyu
(Department of Physics, Hanyang University)
- 발행 : 2013.02.18
초록
Commercial applications of indium tin oxide (ITO) can be separated into two useful areas. As it is perceived to bear electrical properties and optical transparency at once, its chance to apply to promising fields, usually for an optical device, gets greater in the passing time. ITO is one of the transparent conducting oxides (TCO), and required to carry the relative resistance less than