한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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- Pages.144.2-144.2
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- 2013
Soft Lithography of Graphene Sheets Via Surface Energy Modification
- Kim, Hansun (Thin Film Materials Research Group, Korea Research Institute of Chemical Technology) ;
- Jung, Min Wook (Thin Film Materials Research Group, Korea Research Institute of Chemical Technology) ;
- Myung, Sung (Thin Film Materials Research Group, Korea Research Institute of Chemical Technology) ;
- Jung, Daesung (Department of Physics, Sungkyunkwan University) ;
- Lee, Sun Sook (Thin Film Materials Research Group, Korea Research Institute of Chemical Technology) ;
- Kong, Ki-Jeong (Thin Film Materials Research Group, Korea Research Institute of Chemical Technology) ;
- Lim, Jongsun (Thin Film Materials Research Group, Korea Research Institute of Chemical Technology) ;
- Lee, Jong-Heun (Department of Materials Engineering, Korea University) ;
- Park, Chong Yun (Department of Physics, Sungkyunkwan University) ;
- An, Ki-Seok (Thin Film Materials Research Group, Korea Research Institute of Chemical Technology)
- 발행 : 2013.08.21
초록
With the synthesis of graphene sheets as large-scale and high quality, it is essentially important to develop suitable graphene patterning process for future industrial applications. Especially, transfer or patterning method of CVD-grown graphene has been studied. We report simple soft lithographic process to develop easily applicable patterning method of large-scale graphene sheets by using chemically functionalized polymer stamp. Also important applications, the prototype capacitors with graphene electrode and commercial polymer dielectrics for the electrostatic-type touch panel are fabricated using the developed soft lithographic patterning and transfer process.